ASTM F24

This test method establishes the standard procedures for measuring and quantizing the size distribution of particulate contamination either on, or washed from, the surface of small electron-device components. The apparatus and reagents required for this test are also enumerated herein. The number of required test specimens is governed by the dimensions of the component or surface being analyzed. Results shall be interpreted as particles per component or particles per square centimetre of component surface.

This abstract is a brief summary of the referenced standard. It is informational only and not an official part of the standard; the full text of the standard itself must be referred to for its use and application. ASTM does not give any warranty express or implied or make any representation that the contents of this abstract are accurate, complete or up to date.

1. Scope

1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.

Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.

Index Terms

optical particle counting; particulate contamination; size distribution analysis; surfaces; ICS Number Code 17.040.20

Citing ASTM Standards

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